JPH0210458U - - Google Patents

Info

Publication number
JPH0210458U
JPH0210458U JP8451088U JP8451088U JPH0210458U JP H0210458 U JPH0210458 U JP H0210458U JP 8451088 U JP8451088 U JP 8451088U JP 8451088 U JP8451088 U JP 8451088U JP H0210458 U JPH0210458 U JP H0210458U
Authority
JP
Japan
Prior art keywords
crucible
vacuum evaporation
hearth liner
holds
tile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8451088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8451088U priority Critical patent/JPH0210458U/ja
Publication of JPH0210458U publication Critical patent/JPH0210458U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8451088U 1988-06-28 1988-06-28 Pending JPH0210458U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8451088U JPH0210458U (en]) 1988-06-28 1988-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8451088U JPH0210458U (en]) 1988-06-28 1988-06-28

Publications (1)

Publication Number Publication Date
JPH0210458U true JPH0210458U (en]) 1990-01-23

Family

ID=31309196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8451088U Pending JPH0210458U (en]) 1988-06-28 1988-06-28

Country Status (1)

Country Link
JP (1) JPH0210458U (en])

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